| Aperture | 14 mm |
| Angle Transmitter of Galvanometer Scanners | analog position detector |
Optical Configuration
| Wavelength range (standard) |
Standard coatings for all common laser systems: YAG- & fiber lasers, Green lasers, UV lasers, DUV lasers, CO2 lasers In addition, our portfolio includes numerous multiple wavelength and broadband coatings, as well as coatings for short-pulse applications and polarization-maintaining coatings |
| Max. laser power (standard systems, 100% duty cycle) |
440 W @ 1064 nm |
| Typical scan angle | ±0.35 rad (opt.) |
| Image field size (1064 nm, f = 160 mm) |
95 mm x 95 mm |
| Typical spot size (1064 nm, f = 160 mm, M2 = 1.0) |
23 µm |
Dynamics
| Number of installed tunings | up to 3 |
| Typical tuning | sharp edge tuning |
| Tracking error | 0.15 ms |
| Marking speed (f = 160 mm) |
2.0 m/s |
| Positioning speed (f = 160 mm) |
5.0 m/s |
| Writing speed (with F-Theta lens, f = 160 mm) |
High writing quality: 480 cps Good writing quality: 680 cps |
| Step response time (settling to 1/1000 of full scale) |
1% of full scale: 0.45 ms 10% of full scale: 3.0 ms |
Precision
| Repeatability (RMS) |
< 2 µrad |
| Positioning resolution (max.)* |
18 bit * |
| Nonlinearity | < 0.9 mrad / 44° |
| Temperature drift | Offset: < 15 µrad/K Gain: < 25 ppm/K |
| 8-h-drift (after 30 min warm-up) |
Offset: < 100 µrad Gain: < 100 ppm |
| 24-h-drift (after 3 h warm-up) |
Offset: < 100 µrad Gain: < 100 ppm |
Electronics / Control
| Servo control galvanometer scanner | digital servo control board |
| Control interface (alternatives) |
digital SL2-100, digital XY2-100 Enhanced |
| Advanced diagnosis options | yes (iDRIVE) |
| Power requirements | Available variants: 30 V DC, max. 6 A 48 V DC, max. 6 A |
Mechanics
| Scan axes | 2-axis system |
| Housing variants | standard: scan head alternative: module (without housing) |
| Connector positions | beam entrance side, alternatively opposite to beam exit side |
| Weight without objective (standard housing) |
3 kg |
| Dimensions (L x W x H) (standard housing) |
(175 x 118 x 147) mm3 |
| Beam displacement | 16.42 mm |
Other Provisions
| Water cooling | optionally |
| Air cooling | optionally |
Other Specifications
| Operating temperature | 25 °C ± 10 °C |
| Gain error | < 5 mrad |
| Zero offset deviation | < 5 mrad |
Applications
- Micromachining
- Marking
- Welding
- Drilling
- Rapid prototyping
- Rapid tooling
- Materials processing in the semiconductor industry
- Processing-on-the-fly
Technical drawings
